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height="404" align="middle" alt="" /></p><p> </p><div>　　三種工藝流程：</div><div>　　1、采用離子交換方式，其流程如下：</div><div>　　原水→原水加壓泵→多介質過濾器→活性炭過濾器→軟水器→精密過濾器→陽樹脂過濾床→陰樹脂過濾床→陰陽樹脂混床→微孔過濾器→用水點；</div><div>　　2、采用兩級反滲透方式，其流程如下：</div><div>　　原水→原水加壓泵→多介質過濾器→活性炭過濾器→軟水器→精密過濾器→第一級反滲透 →PH調節→中間水箱→第二級反滲透→純化水箱→純水泵→微孔過濾器→用水點；</div><div>　　3、采用EDI方式，其流程如下：</div><div>　　原水→原水加壓泵→多介質過濾器→活性炭過濾器→軟水器→精密過濾器→一級反滲透機→中間水箱→中間水泵→EDI系統→微孔過濾器→用水點；</div><div>　　隨著膜分離技術的不斷成熟，現在單晶硅爐用超純水設備常常采用反滲透過濾工藝，或者是采用一級反滲透后面再經過離子交換混床工藝來制取超純水。</div><div> </div><div>　　單晶硅爐用超純水設備的使用特點：</div><div>　　1、整體化程度高，易于擴展，增加膜數量即可增加處理量；</div><div>　　2、自動化程度高，遇故障立即自停，具有自動保護功能；</div><div>　　3、膜組件為復合膜卷制而成，表現出更高的溶質分離率和透過速率；</div><div>　　4、能耗低，水利用率高，運行成本低；</div><div>　　5、結構合理，占地面積少；</div><div>　　6、先進的膜保護系統，在設備關機，淡化水可自動將膜面污染物沖洗干凈，延長膜壽命；</div><div>　　7、系統無易損部件，無須大量維修，運行長期有效；</div><div>　　8、設備設計有膜清洗系統用阻垢系統。</div> </div> <div class="articleCtrl"> <p class="fl eps"><span>上一篇:<a href="/News-1371738.html">致水分享：直飲水處理設備結構、安裝、保養方法等知識點</a></span></p> <p class="fr eps">下一篇：<a 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