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src="https://img79.chem17.com/9/20210816/637647269541607634653.png" width="660" height="500" align="middle" alt="" /></p><div>　　微電子行業用超純水設備的水質標準：</div><div>　　1、2000版藥典標準；</div><div>　　2、GMP標準；</div><div>　　3、電阻率：≥15MΩ.CM；</div><div>　　4、電導率：≤0.5μS；</div><div>　　5、氨≤0.3μg/ml；</div><div>　　6、硝酸鹽≤0.06μg/ml；</div><div>　　7、重金屬≤0.5μg/ml。</div><div> </div><div>　　目前微電子產品用超純水設備的工藝基本上是以上三種，其余的工藝流程大都是在以上三種基本工藝流程的基礎上進行不同組合搭配衍生而來?，F將他們的優點分別列于下面：</div><div>　　第1種，采用離子交換樹脂其優點在于初投資少，占用的地方少；</div><div>　　第2種，采用反滲透作為預處理再配上離子交換設備，其特點為初投次比采用離子交換樹脂方式要高，但離子設備再生周期相對要長，耗費的酸堿比單純采用離子樹脂的方式要少很多；</div><div>　　第3種，采用反滲透作預處理再配上電去離子(EDI)裝置，這是目前制取超純水經濟，環保用來制取超純水的工藝，不需要用酸堿進行再生便可連續制取超純水，對環境沒什么破壞性。</div><div> </div><div>　　主要特點：</div><div>　　1、脫鹽率大于99.9%，效率遠遠高于兩級反滲透和單純的離子交換；</div><div>　　2、電腦元件用超純水設備的自動化程度高，易維護，可設計成完善的膜技術高純水生產線；</div><div>　　3、離子交換樹脂不需用酸堿再生，節約大量酸堿和清洗用水，降低勞動強度；</div><div>　　4、清潔生產，無廢水處理問題，利于環保；</div><div>　　5、電腦元件用超純水設備采用的先進技術較傳統的離子交換法脫鹽節約樹脂95%以上；</div><div>　　6、占地面積小，單一系統連續運轉，不需建設備用系統；</div><div>　　7、微電子產品用超純水設備的產水電阻率15~18MΩ·cm，pH6.5~7.0，硅<1.0ppb，實現了徹底無菌。</div> </div> <div class="articleCtrl"> <p class="fl eps"><span>上一篇:<a href="/News-1360019.html">工業去離子水設備有哪些分類，用久后濾芯怎么更換？</a></span></p> <p class="fr eps">下一篇：<a href="/News-1355633.html">怎樣才能更加安全有效的使用純水設備？</a></p> </div> </div> </div> </div>  <div class="footer"> <div class="w1100"> <div class="foot cl"> <div class="quick fl"> <p><span class="cn">快捷導航</span><span class="en">QUICK NAVIGATION</span></p> <div class="quickWrap"> <span class="ib"><a href="/">網站首頁</a></span> <span class="ib"><a href="/aboutus.html" rel="nofollow">關于我們</a></span> <span class="ib"><a href="/products.html">產品中心</a></span> <span class="ib"><a 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