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align="middle" alt="" /></p><div>　　半導體顯象管用超純水設備制取超純水的工藝有：</div><div>　　反滲透+EDI系統，離子交換系統，拋光混床工藝，當然還有雙級反滲透。</div><div>　　無論是制取醫藥超純水，還是制取太陽能光伏行業超純水，還是制取其它行業超純水，都離不開這種三工藝。不同的行業用水標準也不一樣，有的客戶需要電導率≤20us.cm，有的則是電導率≤10us.cm，還有的是電阻率：≥10MΩ.CM，甚至還有的是電阻率：≥15MΩ.CM的電阻率≥5MΩ.CM，有三種工藝。一種是全離子，也就是離子交換（陽床+陰床+混床），一種是反滲透+混床，用反滲透代替了陽床+陰床。還有一種就是用反滲透+EDI的。三種工藝雖然都可以做出同樣的水，可工藝不同，設備的價格也不同。</div><div> </div><div>　　工藝流程如下：</div><div>　　1、采用EDI方式，其流程如下：原水→原水加壓泵→多介質過濾器→活性炭過濾器→軟水器→過濾器→一級反滲透機→中間水箱→中間水泵→EDI系統→微孔過濾器→用水點。</div><div>　　2、采用離子交換方式，其流程如下：原水→原水加壓泵→多介質過濾器→活性炭過濾器→軟水器→過濾器→陽樹脂過濾床→陰樹脂過濾床→陰陽樹脂混床→微孔過濾器→用水點。</div><div>　　3、反滲透+混床原水→原水加壓泵→多介質過濾器→活性炭過濾器→軟水器→過濾器→反滲透設備→陰陽樹脂混床（拋光混床）→微孔過濾器→用水點。</div><p align="center"><img src="https://img79.chem17.com/9/20210803/637636079838052233514.png" width="666" height="500" align="middle" alt="" /></p> </div> <div class="articleCtrl"> <p class="fl eps"><span>上一篇:<a href="/Article-2741173.html">詳細分析微電子產品用超純水設備的技術特征、優點及工作過程</a> </span></p> <p class="fr eps">下一篇：<a 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